Micro-Oscillator as Integrable Sensor for Structure-Borne Ultrasound

Motivated by their functional conformity, micro-cantilever-based MEMS oscillators are investigated in this study as structure-integrable transducers for the acquisition of guided ultrasonic waves fiber–metal laminates. While acceleration-sensitive limited maximum frequency, presented displacement-sensitive oscillator is operated quasi-free fashion a seismometer, making it particularly sensitive high-frequency displacements above sensor’s resonance frequency. The potential non-traditional application seismometer structure-borne ultrasound demonstrated experimentally. Therefore, formed from membrane established pressure sensors femtosecond laser micro-machining and mounted onto setup stimulation ultrasound. Experimental results indicate targeted proportionality stimulus sensor response. In conclusion, enable could therefore serve waves.